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How to Optimize Boron Removal System for Semiconductor

Paths to Improve Boron Rejection using 2-Pass RO

Typical Boron RO Rejection Expectations

  • Without pH adjustment, a 2-pass RO may not reliably achieve low boron (especially if target is <100 ppb).

  • With interpass pH adjusted >9.5 and a high-boron-rejection 2nd-pass RO membrane like ExcellPureRO, many systems see substantial improvement (a several-fold reduction in boron permeate concentration).

Boron Levels in Typical RO Feedwaters

  • Municipal water: 0.1-0.5 ppm
  • Well water: 0.3-1 ppm
  • Seawater: 3-7 ppm

Boron Levels Required for Semiconductor Manufacturing

  • Minimum: <0.3 ppb
  • Optimum: <50 ppt
  • Detection Limit (ICP): <1 ppt

Paths to Improve Boron Rejection using 2-Pass RO

  1. Raise feed pH to the 2nd-pass RO into the ~9.5–9.8 range so boric acid converts to borate ion (B(OH)₄⁻) which RO rejects much better. CO2 is also minimized.

  2. Use a tighter/high-rejection membrane for the 2nd pass (low MWCO / high-boron rejection type).

  3. Operate at higher RO flux in the 2nd pass (improves rejection). 2nd pass can run at 30+ GFD.

  4. Operate the EDI at higher than normal voltage to encourage water splitting. Minimize FCE fed to the EDI. CO2 is minimized because of interstage pH.
  5. Add a polishing resin (boron-selective media) downstream. This also affords boron security against RO-EDI upsets.

Why pH matters (most effective single change)

  • Boric acid pKa ≈ 9.2. Below that most boron is neutral boric acid → passes the membrane. Above that it converts to borate ion → much higher RO rejection.

  • Practical target: dose NaOH so the feed to the 2nd pass is 9.5–9.8. Use an accurate pH sensor like pHure from Mettler-Toledo. At pH 9.5 boron is 66% ionized. At pH 9.8 boron is 80% ionized. With a boron-specific RO membrane that rejects both ionic and uncharged boric acid the RO is optimized.

  • Tradeoffs: raising pH increases NaOH passage, so slightly increases 2nd Pass RO permeate conductivity.

  • Read more about boron in water here.

Membrane & system operating changes

  • Use membranes optimized for boron/high salt rejection in the 2nd pass (higher silica/boron rejection chemistry, lower MWCO). This often helps without huge operational changes.

  • Higher flux (increase permeate flow per element in 2nd pass) — increase rejection by driving transport conditions favorable to rejection.

  • Run slightly higher feed pressure if needed to maintain permeate but be mindful of membrane limits.

  • Increase stage recovery distribution rather than forcing a single stage high recovery. Two-stage staging can improve permeate quality.

Summary

  • Without pH adjustment, a 2-pass RO may not reliably get very low boron.

  • With pH adjusted >9.5 and a high-rejection 2nd pass membrane like ExcellPureRO, many systems see substantial improvement (often several-fold reduction in boron permeate concentration).